Radio Frequency Glow Discharge Optical Emission Spectroscopy (rf-GD-OES)

RF Glow Discharge Atomic Emission Spectroscopy of Non-Conducting Materials

Radio Frequency Glow Discharge Optical Emission Spectroscopy Depth Profiling Analysis of Thin Anodic Alumina Films as Potential Reference Materials

s in any form of chemical analysis, the quality of information obtained from a depth profiling experiment is only as good as the reference materials that are used to calibrate the instrument. In the case of depth profiling, calibration must take place in terms of chemical composition as well as distribution with respect to the specimen surface. The nature of applications requiring such analyses...

Spatially resolved observation of a radio-frequency-powered glow discharge plasma for emission spectrometric analysis.

In glow discharge optical emission spectrometry, two-dimensional emission images for iron atomic lines were measured by using an imaging spectrograph equipped with a CCD detector, when a radio-frequency (r.f.) power source was employed for excitation. Emission images at the Fe I 371.99-nm and the Fe I 375.82-nm lines, having different excitation energies, were analyzed by the two-line method to...

Study of Plasma System by OES (Optical Emission Spectroscopy)

Low-temperature and low-pressure plasma was investigated by OES (optical emission spectroscopy) in the range 200–1100 nm. For displaying measured emission spectra and identification of spectrum lines the software Spectrum Analyzer was used. Two modes of glow discharge present in the DC cylindrical magnetron apparatus which were previously researched by a mass spectrometer were studied by OES. T...

Practical Comparisons Between RF-GD-OES and GDMS

While GDMS is the technique of choice for high sensitivity metals and semiconductor analyses, there are no commercially available radio frequency-GDMS sources. Thus, bulk non-conductive materials must be ground to a powder, mixed with metal, and pressed to form a conductive disk. The analysis of thick oxide or polymer layers is not available directly. In some cases, a conductive metal mask (cal...